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Correlative SEM/STM study of local electronic properties in compound semiconductors

Piqueras de Noriega, Javier ; Panin, G.N. ; Díaz-Guerra Viejo, Carlos ; Hidalgo Alcalde, Pedro ; Méndez Martín, Bianchi | Trans Tech-Scitec Publications LTD | 1998

The use of combined SEM/STM instruments enables to position the tunnel tip in the region of the sample to be investigated by STM or/and by scanning tunneling spectroscopy (STS). In this work a STM has been implemented in the chamber of a SEM pro[...]

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