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Saez Landete, José ; Alonso Fernández, José ; Sánchez Brea, Luis Miguel ; Morlanes Calvo, Tomás ; Bernabeu Martínez, Eusebio | Optical Society of America | 2009-09-01Two-grating measurement systems are routinely employed for high-resolution measurements of angular and linear displacement. Usually, these systems incorporate zero reference codes (ZRCs) to obtain a zero reference signal (ZRS), which is used as [...]texto impreso
Saez Landete, José ; Alonso Fernández, José ; Bernabeu Martínez, Eusebio | The Optical Society Of America | 2005-05-30A method to obtain the absolute measure of the position is by means of the autocorrelation of two zero reference marks. In one-axis measurement systems one dimensional mark are used and the design of these marks is relatively complex. When the m[...]texto impreso
Saez Landete, José ; Alonso Fernández, José ; Bernabeu Martínez, Eusebio | The Optical Society Of America | 2005-01-10The grating measurement systems can be used for displacement and angle measurements. They require of zero reference codes to obtain zero reference signals and absolute measures. The zero reference signals are obtained from the autocorrelation of[...]texto impreso
El estudio de la generación y detección de señales de referencia es fundamental para el posicionado absoluto en codificadores ópticos y en alineadores de máscaras en fotolitografía. En la memoria de Tesis Doctoral se presenta un análisis de la t[...]texto impreso
Saez Landete, José ; Salcedo Sanz, Sancho ; Rosa Zurera, Manuel ; Alonso Fernández, José ; Bernabeu Martínez, Eusebio | IEEE (Institute of Electrical and Electronics Engineers) | 2007-07In grating measurement systems, a reference signal is needed to achieve an absolute measurement of the position. The zero reference signals are normally obtained illuminating two identical superimposed zero reference codes (ZRCs) and registering[...]texto impreso
Sánchez Brea, Luis Miguel ; Saez Landete, José ; Alonso Fernández, José ; Bernabeu Martínez, Eusebio | The Optical Society Of America | 2008-04-01The Talbot effect is a well studied phenomenon by which grating pseudoimages appear at certain periodic distances when monochromatic light is used. Recently, numerical simulations have shown a new phenomenon; when a polychromatic light beam is u[...]texto impreso
Saez Landete, José ; Salcedo Sanz, Sancho ; Rosa Zurera, Manuel ; Alonso Fernández, José ; Bernabeu Martínez, Eusebio | The Optical Society Of America | 2005-10-15A new technique for the generation of optical reference signals with optimal properties is presented. In grating measurement systems a reference signal is needed to achieve an absolute measurement of the position. The optical signal is the autoc[...]texto impreso
Morlanes Calvo, Tomás ; Peña, José Luis de la ; Sánchez Brea, Luis Miguel ; Alonso Fernández, José ; Crespo Vázquez, Daniel ; Saez Landete, José ; Bernabeu Martínez, Eusebio | Society of Photo-Optical Instrumentation Engineers (SPIE) | 2005In this work, an optoelectronic device that provides the absolute position of a measurement element with respect to a pattern scale upon switch-on is presented. That means that there is not a need to perform any kind of transversal displacement [...]
