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Schmidt, Rainer ; Mayrhofer, Patrick ; Schmid, Ulrich ; Bittner, Achim | American Institute of Physics | 2019-02-26In this work, a comprehensive characterization of metal-insulator-semiconductor structures by impedance spectroscopy is demonstrated for the case of electrically insulating, highly c-axis oriented, 600 nm sputter-deposited AlN films on n-Si subs[...]
